There are some permissions that are not applicable to a scratch org and this is one of those weird ones. Pushing the standard Admin profile to my scratch org I encountered this error.

You may not modify the permission Access Tracer for External Data Sources while editing a Standard Profile.

To fix this you need to edit and remove this specific profile permission. So far I cannot find any documentation about this TraceXdsQueries permission and what it actually does.

    <userPermissions>
        <enabled>true</enabled>
        <name>TraceXdsQueries</name>
    </userPermissions>